Keywords
Optisk diffraktions mikroskop
Gittermåling
How to Cite
Abstract
We present a new optical diffraction microscope (ODM) developed at Dansk Fundamental Metrologi. The article describes the modeling of grating structures and compares ODM with AFM and SEM. It shows how spectral analysis can reconstruct nanogeometries with high precision and fast measurement time. A strong example of applied optics in industrial metrology.
References
[1] P.-E. Hansen and N. Agersnap Optical Diffraction Microscope for Measuring Submicron Gratings. Suss Report 1st Quarter 2004.
[2] P.-E. Hansen and J. C. Petersen (2006), Hurtige overfladekvalitetsmålinger i en driftssituation. Teknisk nyt nr. 46, 2006.
[3] J. Garnaes P.-E. Hansen, N. Agersnap, J. Holm, F. Borsetto, and A. Kühle (2006), Profiles of high aspect ratio grating determined by optical diffraction microscopy and atomic force microscopy, Appl. Opt. Vol 45, page 3201-3212 (2006).
https://doi.org/10.1364/AO.45.003201
[4] P.-E. Hansen, N. Agersnap, A. Kühle, J. Garnaes and J. C. Petersen (2007), Profile characterization using optical diffraction microscopy (ODM), Proc. Northern Optics 2006, IEEE, page 35-39 (2007), ISBN 14244-0435-5.
https://doi.org/10.1109/NO.2006.348369
[5] P.-E. Hansen and L. Nielsen (2008), Combined optimization and hybrid scalar-vector diffraction metod for grating parameters determination, Proc. of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, Euspen, page 516-521 (2008), ISBN 13: 978-09553082-5-3.
Counting from volume 37 (2026 -), articles published are licensed under Creative Commons Attribution-NonCommercial CC BY-NC 4.0.
Articles in volume 1-36 (1990 - 2025) are not licensed under Creative Commons. In these volumes, all rights are reserved to the authors of the articles respectively.